KMID : 0381920040340010051
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Korean Journal of Microscopy 2004 Volume.34 No. 1 p.51 ~ p.59
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A Study on the Stability of the Accelerating Voltages in Scanning Electron Microscopy
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¹è¹®¼·/Bae MS
¿À»óÈ£/Á¶¾ç±¸/ÀÌÈ®ÁÖ/Oh SH/Cho YK/Lee HJ
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Abstract
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Cathode; Cockcroft-Walton circuit; Electron gun; High voltage generation; SEM; SMPS (switched mode power supply)
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KEYWORD
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